Transistor Structure

TSMC CMOS logic technology relied on planar transistor structures until 2014, when FinFETs were introduced into production with our 16nm technology. The FinFET structure resolved a fundamental limitation of planar device scaling, namely the poor electrostatic control of the channel at short gate lengths. FinFETs also enabled a partial decoupling of the transistor density scaling from device effective width scaling, which is an important feature for attaining increased transistor current per unit footprint of transistors. These FinFET characteristics enabled significant reduction of the power supply voltage as compared to planar transistors. FinFET also presents new degrees of freedom for power performance optimization, which contributed to significant enhancements in energy efficiency from 16nm to our most recently introduced 5nm technology node.

TSMC research and development continues to explore next-generation structures such as stacked nanowires or stacked nanosheets in our quest for new heights in computing performance and energy efficiency for future technology nodes.

  • A 32Gb/s 10.5Tb/s/mm 0.6pJ/b UCIe-Compliant Low-Latency Interface in 3nm Featuring Matched-Delay for Dynamic Clock Gating

    2025
    TSMC presents a UCIe-compliant die-to-die interface achieving 10.5Tb/s/mm beachfront density in 3nmtechnology. Over 64 lanes this paper demonstrates an aggregate eye width of 19ps (61% UI) and an eye height of560mV at 32Gb/s after lane deskew correction, with an energy efficiency of 0.6pJ/b. authors: Mu-Shan Lin, Chien-Chun Tsai, Shenggao Li, Wei-Chih Chen, Wen-Hung Huang, Yu-Chi Chen, Yu-Jie Huang, Alan Drake, Chin Hua Wen, Paul Ranucci, Hsin-Hung Kuo, Aidong Yin, Shu-Chun Yang, Farsheed Mahmoudi, Han-Tzung Ke, Chao-Chieh Li, Nai-Chen Cheng, Jimmy Wang, Kevin Lin, Harry Liao, Jie-Ren Huang, Meng-Hsuan Wu, Kenny Cheng-Hsiang Hsieh, Nicholas Amatruda, William Polanco, David King, Todd Basso, Anwar Kashem, TSMC, Hsinchu, Taiwan, TSMC, San Jose, CA, TSMC, Austin, TX, TSMC, Nanjing, China, AMD, Austin, TX, AMD, San Jose, CA